| AH P/N | OEM P/N | Description |
| YGS001 | 94-3245 | Hard Driver for Gasonics IRIDIA R-PCM |
| YGS002 | 06-2802 | Lift pin |
| YGS003 | 15-161439-00 | Isolating plate, ring carrier |
| YGS004 | 94-3049 | Light probe |
| YGS005 | 94-3243 | Hard drive pre-loaded |
| YGS006 | 94-3244 | Hard drive pre-loaded |
| YGS007 | 60-2025 | 1.9Kw magnetron |